Issued Patents 1997
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5628604 | Conveying system | Masanao Murata, Tsuyoshi Tanaka, Teruya Morita, Hiroyuki Oyobe | 1997-05-13 |
| 5621982 | Electronic substrate processing system using portable closed containers and its equipments | Masanao Murata, Tsuyoshi Tanaka, Teruya Morita, Hitoshi Kawano, Mitsuhiro Hayashi +2 more | 1997-04-22 |