Issued Patents 1997
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5597495 | Method and apparatus for etching surfaces with atomic fluorine | Mark Keil, Joel H. Young | 1997-01-28 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5597495 | Method and apparatus for etching surfaces with atomic fluorine | Mark Keil, Joel H. Young | 1997-01-28 |