Issued Patents 1997
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5637904 | Micromechanical component with a switch element as a movable structure, microsystem, and production process | — | 1997-06-10 |
| 5611940 | Microsystem with integrated circuit and micromechanical component, and production process | — | 1997-03-18 |
| 5602411 | Micromechanical component with a dielectric movable structure, and microsystem | — | 1997-02-11 |
| 5600190 | Micromechanical component part and method for the manufacture thereof | — | 1997-02-04 |