Issued Patents 1997
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5681425 | Teos plasma protection technology | — | 1997-10-28 |
| 5647952 | Chemical/mechanical polish (CMP) endpoint method | — | 1997-07-15 |
| 5643050 | Chemical/mechanical polish (CMP) thickness monitor | — | 1997-07-01 |
| 5637031 | Electrochemical simulator for chemical-mechanical polishing (CMP) | — | 1997-06-10 |
| 5635425 | In-situ N.sub.2 plasma treatment for PE TEOS oxide deposition | — | 1997-06-03 |