Issued Patents 1997
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5691215 | Method for fabricating a sub-half micron MOSFET device with insulator filled shallow trenches planarized via use of negative photoresist and de-focus exposure | Hong Dai, Shih-Chang TAI | 1997-11-25 |
| 5670281 | Masks and methods of forming masks which avoid phase conflict problems in phase shifting masks | — | 1997-09-23 |
| 5670404 | Method for making self-aligned bit line contacts on a DRAM circuit having a planarized insulating layer | — | 1997-09-23 |
| 5604157 | Reduced notching of polycide gates using silicon anti reflection layer | Jau-Hwang Ho, Lou G. Chine | 1997-02-18 |