Issued Patents 1997
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5663785 | Diffraction pupil filler modified illuminator for annular pupil fills | Joseph P. Kirk | 1997-09-02 |
| 5657235 | Continuous scale optical proximity correction by mask maker dose modulation | Lars Liebmann, J. Weed | 1997-08-12 |