Issued Patents 1997
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5650731 | Photovoltaic oxide charge measurement probe technique | Min-Su Fung, Bob H. Yun | 1997-07-22 |
| 5644223 | Uniform density charge deposit source | — | 1997-07-01 |
| 5594247 | Apparatus and method for depositing charge on a semiconductor wafer | Gregory S. Horner, Thomas G. Miller | 1997-01-14 |