Issued Patents 1997
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5674413 | Scattering reticle for electron beam systems | Werner Stickel | 1997-10-07 |
| 5633507 | Electron beam lithography system with low brightness | Werner Stickel | 1997-05-27 |
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5674413 | Scattering reticle for electron beam systems | Werner Stickel | 1997-10-07 |
| 5633507 | Electron beam lithography system with low brightness | Werner Stickel | 1997-05-27 |