Issued Patents 1997
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5670018 | Isotropic silicon etch process that is highly selective to tungsten | Elke Eckstein, Birgit Hoffman, deceased, Waldemar Walter Kocon, Marc Jay Weiss | 1997-09-23 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5670018 | Isotropic silicon etch process that is highly selective to tungsten | Elke Eckstein, Birgit Hoffman, deceased, Waldemar Walter Kocon, Marc Jay Weiss | 1997-09-23 |