Issued Patents 1997
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5637237 | Method for hot wall reactive ion etching using a dielectric or metallic liner with temperature control to achieve process stability | Gottlieb S. Oehrlein, Ying Zhang, Marco Haverlag | 1997-06-10 |