Issued Patents 1997
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5701647 | Method for making an isolated sidewall capacitor having a compound plate electrode | Katherine L. Saenger | 1997-12-30 |
| 5675471 | Characterization, modeling, and design of an electrostatic chuck with improved wafer temperature uniformity | — | 1997-10-07 |
| 5636320 | Sealed chamber with heating lamps provided within transparent tubes | Chienfan Yu, Wesley C. Natzle | 1997-06-03 |
| 5633781 | Isolated sidewall capacitor having a compound plate electrode | Katherine L. Saenger | 1997-05-27 |