Issued Patents 1997
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5639316 | Thin film multi-layer oxygen diffusion barrier consisting of aluminum on refractory metal | Evan G. Colgan, Alfred Grill | 1997-06-17 |
| 5634973 | Low temperature selective growth of silicon or silicon alloys | Kevin K. Chan, Jack O. Chu, James M. E. Harper | 1997-06-03 |
| 5624869 | Method of forming a film for a multilayer Semiconductor device for improving thermal stability of cobalt silicide using platinum or nitrogen | Paul D. Agnello, Lawrence A. Clevenger, Matthew W. Copel, Francois M. d'Heurle, Qi-Zhong Hong | 1997-04-29 |
| 5625233 | Thin film multi-layer oxygen diffusion barrier consisting of refractory metal, refractory metal aluminide, and aluminum oxide | Evan G. Colgan, Alfred Grill | 1997-04-29 |
| 5608266 | Thin film for a multilayer semiconductor device for improving thermal stability and a method thereof | Paul D. Agnello, Lawrence A. Clevenger, Matthew W. Copel, Francois M. d'Heurle, Qi-Zong Hong | 1997-03-04 |
| 5595600 | Low temperature selective growth of silicon or silicon alloys | Kevin K. Chan, Jack O. Chu, James M. E. Harper | 1997-01-21 |