Issued Patents 1997
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5659187 | Low defect density/arbitrary lattice constant heteroepitaxial layers | Francoise Kolmer Legoues | 1997-08-19 |
| 5607511 | Method and apparatus for low temperature, low pressure chemical vapor deposition of epitaxial silicon layers | — | 1997-03-04 |