Issued Patents 1997
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5698350 | Light exposure method for the fabrication of semiconductor devices | — | 1997-12-16 |
| 5698347 | Reticle for off-axis illumination | — | 1997-12-16 |
| 5675418 | Pattern alignment mark of semiconductor device | Byoung Il Choi | 1997-10-07 |
| 5668042 | Method for aligning micro patterns of a semiconductor device | — | 1997-09-16 |
| 5635336 | Method for the preparation of a pattern overlay accuracy-measuring mark | — | 1997-06-03 |
| 5635335 | Method for fabricating semiconductor device utilizing dual photoresist films imaged with same exposure mask | Seung Chan Moon | 1997-06-03 |
| 5633173 | Method for detecting wafer defects | — | 1997-05-27 |
| 5598250 | Prefabricated modified illumination apparatus for forming fine patterns in a semiconductor device | — | 1997-01-28 |