Issued Patents 1997
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5702970 | Method for fabricating a capacitor of a semiconductor device | — | 1997-12-30 |
| 5686358 | Method for forming a plug in a semiconductor device | — | 1997-11-11 |
| 5670420 | Method of forming metal interconnection layer of semiconductor device | — | 1997-09-23 |
| 5637533 | Method for fabricating a diffusion barrier metal layer in a semiconductor device | — | 1997-06-10 |
| 5633201 | Method for forming tungsten plugs in contact holes of a semiconductor device | — | 1997-05-27 |
| 5595936 | Method for forming contacts in semiconductor device | Choon Hwan Kim | 1997-01-21 |