Issued Patents 1997
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5665613 | Method of making semiconductor device having SIMOX structure | Sadao Nakashima, Norihiko Ohwada, Tatsuhiko Katayama | 1997-09-09 |
| 5658809 | SOI substrate and method of producing the same | Sadao Nakashima, Norihiko Ohwada, Tatsuhiko Katayama | 1997-08-19 |