Issued Patents 1997
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5620526 | In-situ cleaning of plasma treatment chamber | Hirofumi Watatani, Masahiko Doki, Shoji Okuda, Junya Nakahira | 1997-04-15 |
HK
Hideaki Kikuchi
Fujitsu Vlsi Limited: 1 patents #1 of 62Top 2%
Overall (1997): #141,826 of 185,788Top 80%
1
Patents 1997