Issued Patents 1997
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5626682 | Process and apparatus for treating inner surface treatment of chamber and vacuum chamber | Nobuo Hirano, Manabu Matsumoto, Mamoru Katane, Hiroaki Sakurabata, Shiro Matsuzaki | 1997-05-06 |