Issued Patents 1997
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5650038 | Method for dry etching | Takao Kumihashi, Shinichi Tachi | 1997-07-22 |
| 5643473 | Dry etching method | Shinichi Tachi, Sadayuki Okudaira, Kiichiro Mukai | 1997-07-01 |
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5650038 | Method for dry etching | Takao Kumihashi, Shinichi Tachi | 1997-07-22 |
| 5643473 | Dry etching method | Shinichi Tachi, Sadayuki Okudaira, Kiichiro Mukai | 1997-07-01 |