Issued Patents 1997
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5650262 | High-resolution negative photoresist with wide process latitude | Norbert Munzel, Heinz Holzwarth | 1997-07-22 |
| 5627011 | High resolution i-line photoresist of high sensitivity | Norbert Munzel, Heinz Holzwarth, Stephan Ilg | 1997-05-06 |