Issued Patents 1997
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5620524 | Apparatus for fluid delivery in chemical vapor deposition systems | Chiko Fan, Anthony Pearson, J. James Chen | 1997-04-15 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5620524 | Apparatus for fluid delivery in chemical vapor deposition systems | Chiko Fan, Anthony Pearson, J. James Chen | 1997-04-15 |