Issued Patents 1997
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5665968 | Inspecting optical masks with electron beam microscopy | Dan Meisburger, Alan D. Brodie, Zhong-Wei Chen, Brian J. Grenon | 1997-09-09 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5665968 | Inspecting optical masks with electron beam microscopy | Dan Meisburger, Alan D. Brodie, Zhong-Wei Chen, Brian J. Grenon | 1997-09-09 |