Issued Patents 1997
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5698039 | Process for cleaning a substrate using a barrier discharge | Ulrich Patz, Michael Scherer, Willi Neff | 1997-12-16 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5698039 | Process for cleaning a substrate using a barrier discharge | Ulrich Patz, Michael Scherer, Willi Neff | 1997-12-16 |