Issued Patents 1997
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5699145 | Scanning type exposure apparatus | Susumu Makinouchi | 1997-12-16 |
| 5663783 | Stage-drive controlling device, projection exposure apparatus including the same, and method of controlling the driving of a stage | — | 1997-09-02 |