Issued Patents 1997
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5680253 | Light beam scanning apparatus comprising a first and second diffraction grating plate | Shigeo Kayashima, Satoshi Maeda, Shigetake Iwata, Fumio Yamagishi, Masato Nakashima +2 more | 1997-10-21 |
| 5676758 | CVD apparatus | Shigeru Mizuno, Kazuhito Watanabe, Nobuyuki Takahashi, Manabu Tagami, Takanori Yoshimura +1 more | 1997-10-14 |