Issued Patents 1997
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5644138 | Electron beam exposure apparatus and a method for electron beam exposure | — | 1997-07-01 |
SH
Shin-ichi Hamaguchi
Overall (1997): #79,040 of 185,788Top 45%
1
Patents 1997