Issued Patents 1997
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5609688 | Apparatus for producing semiconductor device | Tetsuya Hayashi, Kazunori Okuyama, Tsuyoshi Inomata, Minoru Hirose | 1997-03-11 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5609688 | Apparatus for producing semiconductor device | Tetsuya Hayashi, Kazunori Okuyama, Tsuyoshi Inomata, Minoru Hirose | 1997-03-11 |