Issued Patents 1997
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5681780 | Manufacture of semiconductor device with ashing and etching | Satoru Mihara, Tatsuya Takeuchi | 1997-10-28 |
| 5628871 | Method of removing resist mask and a method of manufacturing semiconductor device | — | 1997-05-13 |