Issued Patents 1997
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5667923 | Charged particle beam exposure compensating proximity effect | — | 1997-09-16 |
HK
Hiroyuki Kanata
Overall (1997): #141,950 of 185,788Top 80%
1
Patents 1997