Issued Patents 1997
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5639357 | Synchronous modulation bias sputter method and apparatus for complete planarization of metal films | — | 1997-06-17 |
ZX
Zheng Xu
Overall (1997): #53,307 of 185,788Top 30%
1
Patents 1997