Issued Patents 1997
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5681997 | Excitation of polysilicon based piezoresistive pressure sensors | Edward J. McHale | 1997-10-28 |
| 5672551 | Method for manufacturing a semiconductor pressure sensor with single-crystal silicon diaphragm and single-crystal gage elements | — | 1997-09-30 |