Issued Patents 1997
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5679064 | Polishing apparatus including detachable cloth cartridge | Toyomi Nishi, Tetsuji Togawa | 1997-10-21 |
| 5672091 | Polishing apparatus having endpoint detection device | Tsutomu Takahashi, Keiichi Tohyama | 1997-09-30 |
| 5651725 | Apparatus and method for polishing workpiece | Ritsuo Kikuta, You Ishii | 1997-07-29 |
| 5639388 | Polishing endpoint detection method | Norio Kimura, Fumihiko Sakata | 1997-06-17 |