Issued Patents 1997
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5656542 | Method for manufacturing wiring in groove | Masahiro Miyata, Hirokazu Ezawa, Manabu Tsujimura, Takeyuki Ohdaira, Hiroaki Inoue +1 more | 1997-08-12 |
| 5630881 | Thin-film forming apparatus with magnetic bearings and a non-contact seal and drive | Yoichi Kanemitsu | 1997-05-20 |