MH

Masahiro Hatakeyama

EB Ebara: 2 patents #21 of 140Top 15%
Overall (1997): #31,400 of 185,788Top 20%
2
Patents 1997

Issued Patents 1997

Showing 1–2 of 2 patents

Patent #TitleCo-InventorsDate
5677011 Processing method using fast atom beam Chikako Takatou 1997-10-14
5640009 Fast atom beam source 1997-06-17