Issued Patents 1997
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5670217 | Method for capturing and removing contaminant particles from an interior region of an ion implanter | Julian G. Blake, Robert Becker, David J. Chipman, Lyudmila Menn, Frank Sinclair +1 more | 1997-09-23 |
| 5656092 | Apparatus for capturing and removing contaminant particles from an interior region of an ion implanter | Julian G. Blake, Robert Becker, David J. Chipman, Lyudmila Menn, Frank Sinclair +1 more | 1997-08-12 |