Issued Patents 1997
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5627397 | Semiconductor acceleration sensor with source and drain regions | Kazuhiko Kano, Takamoto Watanabe, Kenichi Ao, Masakazu Kanosue, Hirofumi Uenoyama +1 more | 1997-05-06 |
| 5622633 | Semiconductor sensor with suspended microstructure and method for fabricating same | Yoshinori Ohtsuka, Tadashi Hattori | 1997-04-22 |
| 5619050 | Semiconductor acceleration sensor with beam structure | Hirofumi Uenoyama, Kenichi Ao, Masakazu Kanosue, Yasutoshi Suzuki | 1997-04-08 |