Issued Patents 1997
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5677248 | Method of etching semiconductor wafers | Tsuyoshi Fukada, Nobukazu Ohba | 1997-10-14 |
| 5654244 | Process for producing semiconductor strain-sensitive sensor | Tsuyoshi Fukada, Hiroshige Sugito | 1997-08-05 |
| 5643803 | Production method of a semiconductor dynamic sensor | Tsuyoshi Fukada, Yoshimi Yoshino, Hiroshige Sugito | 1997-07-01 |