Issued Patents 1997
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5672211 | Apparatus for depositing a thin layer on a substrate by laser pulse vapor deposition | Hermann Mai, Klaus Schubert | 1997-09-30 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5672211 | Apparatus for depositing a thin layer on a substrate by laser pulse vapor deposition | Hermann Mai, Klaus Schubert | 1997-09-30 |