Issued Patents 1997
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5702569 | Method for manufacturing a thin film actuated mirror having a stable elastic member | Myung Hyun Park, Min-Sik Um | 1997-12-30 |
| 5677785 | Method for forming an array of thin film actuated mirrors | Jae-Hyuk Chung | 1997-10-14 |