Issued Patents 1997
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5640133 | Capacitance based tunable micromechanical resonators | Fred M. Bertsch, Kevin A. Shaw, Scott G. Adams | 1997-06-17 |
| 5637539 | Vacuum microelectronic devices with multiple planar electrodes | Wolfgang Hofmann, Liang-Yuh Chen | 1997-06-10 |
| 5628917 | Masking process for fabricating ultra-high aspect ratio, wafer-free micro-opto-electromechanical structures | Ali Jazairy | 1997-05-13 |
| 5627427 | Silicon tip field emission cathodes | John H. Das, James W. Mayer, James Spallas | 1997-05-06 |
| 5615143 | Optomechanical terabit data storage system | Yu-Hwa Lo | 1997-03-25 |
| 5610335 | Microelectromechanical lateral accelerometer | Kevin A. Shaw, Scott G. Adams | 1997-03-11 |