YP

Yang Pan

CM Chartered Semiconductor Manufacturing: 10 patents #1 of 24Top 5%
📍 Los Altos, CA: #2 of 270 inventorsTop 1%
🗺 California: #39 of 17,285 inventorsTop 1%
Overall (1997): #353 of 185,788Top 1%
11
Patents 1997

Issued Patents 1997

Showing 1–11 of 11 patents

Patent #TitleCo-InventorsDate
5691252 Method of making low profile shallow trench double polysilicon capacitor 1997-11-25
5672544 Method for reducing silicided poly gate resistance for very small transistors 1997-09-30
5672525 Polysilicon gate reoxidation in a gas mixture of oxygen and nitrogen trifluoride gas by rapid thermal processing to improve hot carrier immunity 1997-09-30
5670410 Method of forming integrated CMP stopper and analog capacitor 1997-09-23
5670395 Process for self-aligned twin wells without N-well and P-well height difference 1997-09-23
5667629 Method and apparatus for determination of the end point in chemical mechanical polishing Jiazhen Zheng 1997-09-16
5667424 New chemical mechanical planarization (CMP) end point detection apparatus 1997-09-16
5652177 Method for fabricating a planar field oxide region 1997-07-29
5652152 Process having high tolerance to buried contact mask misalignment by using a PSG spacer Lap Chan, Ravi Sundaresan 1997-07-29
5599726 Method of making a conductive spacer lightly doped drain (LDD) for hot carrier effect (HCE) control 1997-02-04
5595919 Method of making self-aligned halo process for reducing junction capacitance 1997-01-21