Issued Patents 1997
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5701013 | Wafer metrology pattern integrating both overlay and critical dimension features for SEM or AFM measurements | Thomas Chang | 1997-12-23 |
| 5672243 | Antireflection coating for highly reflective photolithographic layers comprising chromium oxide or chromium suboxide | Thomas Chang | 1997-09-30 |
| 5633522 | CMOS transistor with two-layer inverse-T tungsten gate | Fernand Dorleans, Louis L. Hsu, Gerald R. Larsen, Geraldine C. Schwartz | 1997-05-27 |
| 5599725 | Method for fabricating a MOS transistor with two-layer inverse-T tungsten gate structure | Fernand Dorleans, Louis L. Hsu, Gerald R. Larsen, Geraldine C. Schwartz | 1997-02-04 |