Issued Patents 1997
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5643365 | Method and device for plasma vapor chemical deposition of homogeneous films on large flat surfaces | W. Neuberger, V. V. Pavlov | 1997-07-01 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5643365 | Method and device for plasma vapor chemical deposition of homogeneous films on large flat surfaces | W. Neuberger, V. V. Pavlov | 1997-07-01 |