Issued Patents 1997
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5666200 | Method of ellipsometric measurement, an ellipsometer and device for controlling the carrying out of layers using such method and apparatus | Morten Kildemo, Ramdane Benferhat | 1997-09-09 |