Issued Patents 1997
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5607559 | Method of forming thin film on substrate by reactive DC sputtering | Masayuki Yamada, Akira Ishikawa, Tadahiko Saito, Katsuyuki Hatanaka, Hiroshi Inaba | 1997-03-04 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5607559 | Method of forming thin film on substrate by reactive DC sputtering | Masayuki Yamada, Akira Ishikawa, Tadahiko Saito, Katsuyuki Hatanaka, Hiroshi Inaba | 1997-03-04 |