Issued Patents 1997
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5703420 | Moving magnet type multi-phase linear motor with vibration suppression and coil cooling means | Shigeto Kamata | 1997-12-30 |
| 5658700 | Semiconductor manufacturing apparatus having a plurality of measurement devices and a semiconductor manufacturing method using the same | — | 1997-08-19 |