Issued Patents 1997
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5608773 | Mask holding device, and an exposure apparatus and a device manufacturing method using the device | Kouichi Hara, Shinichi Hara | 1997-03-04 |
NK
Nobusige Korenaga
Overall (1997): #98,142 of 185,788Top 55%
1
Patents 1997