Issued Patents 1997
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5685232 | Positioning stage device exposure apparatus and device manufacturing method utilizing the same | — | 1997-11-11 |
| 5606152 | Multilayer insulated wire and a manufacturing method therefor | Atsushi Higashiura, Toshiki Maezono, Nobuyuki Nakamura, Shigeo Yamaguchi, Isamu Kobayashi +1 more | 1997-02-25 |