Issued Patents 1997
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5661547 | Exposure method and apparatus and device produced thereby in which a stop includes an opening which is variable to substantially compensate for a change in bandwidth of a laser beam | Naoto Sano | 1997-08-26 |
| 5597670 | Exposure method and apparatus | Naoto Sano | 1997-01-28 |