Issued Patents 1997
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5629054 | Method for continuously forming a functional deposit film of large area by micro-wave plasma CVD method | — | 1997-05-13 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5629054 | Method for continuously forming a functional deposit film of large area by micro-wave plasma CVD method | — | 1997-05-13 |